Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2002
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Application #:
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09257246
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Filing Dt:
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02/25/1999
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Inventor:
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TSUTOMU MIYATAKE
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Title:
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APPARATUS FOR DETECTING POSITIONS OF WAFER AND MASK AND DEFORMATION ERROR DETECTING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-9-11, KITA-SHINAGAWA |
| SHINAGAWA-KU, TOKYO, JAPAN |
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| NIKAIDO, MARMELSTEIN, MURRAY ET AL. |
| DAVID T. NIKAIDO |
| METROPOLITAN SQUARE, SUITE 330 |
| G ST. LOBBY, 655 15TH STREET, N.W. |
| WASHINGTON, DC 20005-5701 |
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