Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09559904
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Filing Dt:
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04/26/2000
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Inventor:
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Mamoru Nakasuji
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Title:
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Charged-particle-beam microlithography methods exhibiting improved pattern-feature accuracy, and device manufacturing methods comprising same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MARUNOUCHI 3-CHOME, CHIYODA-KU |
| FUJI BUILDING, 2-3 |
| TOKYO 100, JAPAN |
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| KLARQUIST, SPARKMAN CAMPBELL, ET AL. |
| DONALD L. STEPHENS, JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 321 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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