Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/22/2002
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Application #:
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09735318
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Filing Dt:
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12/12/2000
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Inventors:
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Patrick A. Van Cleemput, Ravi Kumar Laxman, Bunsen Nie, Jen Shu, Michelle T. Schulberg
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Title:
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Method to deposit sioch films with dielectric constant below 3 . 0
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN MORRILL MACPHERSON LLP |
| TOM CHEN |
| 25 METRO DRIVE |
| SUITE 700 |
| SAN JOSE, CA 95110 |
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