Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2002
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Application #:
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09553479
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Filing Dt:
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04/20/2000
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Inventors:
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Miwa Kozawa, Keiji Watanabe, Ei Yano
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Title:
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Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, KAMIKODANAKA 4-CHOME NAKAHARA-KU, KAWASAKI-SHI |
| KANAGAWA 211-8588, JAPAN |
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| ARENT FOX KINTER PLOTKIN & KAHN, PLLC |
| CHARLES M. MARMELSTEIN |
| 1050 CONNECTCUT AVE. N.W. |
| SUITE 600 |
| WASHINGTON, D.C. 20036-5339 |
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