Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2002
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Application #:
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09439833
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Filing Dt:
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11/12/1999
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Inventors:
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KRISTIAN E. JOHNSGARD, JEAN-FRANCOIS DAVIET, JAMES A. GIVENS, STEPHEN E. SAVAS et al
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Title:
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APPARATUS AND METHOD FOR THERMAL PROCESSING OF SEMICONDUCTOR SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3550 WEST WARREN AVENUE |
FREMONT, CALIFORNIA 94538 |
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WILSON SONSINI GOODRICH & ROSATI |
MICHAEL J. MURPHY |
SR 1-2 |
650 PAGE MILL ROAD |
PALO ALTO, CA 94304-1050 |
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