Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2002
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Application #:
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09101879
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Filing Dt:
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07/14/1998
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Inventors:
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MASAYUKI TODA, TADAHIRO OHMI, YOSHIO ISHIHARA
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Title:
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TRANSPORTATION METHOD FOR SUBSTRATE WAFERS AND TRANSPORTATION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16-7, NISHI-SHINBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 105-0 |
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| DARBY & DARBY P.C. |
| ATTN: S. PETER LUDWIG |
| 805 THIRD AVENUE, 27TH FLOOR |
| NEW YORK, NY 10022-7513 |
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