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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	6344105	Issue Dt:	02/05/2002	Application #:	09345639	Filing Dt:	06/30/1999
Inventors:	JOHN E. DAUGHERTY, NEIL BENJAMIN, JEFF BOGART, VAHID VAHEDI, DAVID COOPERBERG et al
Title:	TECHNIQUES FOR IMPROVING ETCH RATE UNIFORMITY

Assignment: 1

Reel/Frame:

Recorded: 09/28/1999

Pages: 5

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

08/24/1999

Exec Dt:

09/02/1999

Exec Dt:

09/09/1999

Exec Dt:

08/13/1999

Exec Dt:

08/24/1999

Exec Dt:

08/31/1999

Exec Dt:

08/09/1999

Assignee:

4650 CUSHING PARKWAY

FREMONT, CALIFORNIA 94538

Correspondent:

BEYER & WEAVER, LLP

RAMIN MAHBOUBIAN

P.O. BOX 61059

PALO ALTO, CA 94306

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