Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09340602
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Filing Dt:
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06/25/1999
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Inventors:
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LI-QUN XIA, VISWESWAREN SIVARAMAKRISHNAN, SRINIVAS NEMANI, ELLIE YIEH, GARY FONG
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Title:
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METHODS AND APPARATUS FOR GETTERING FLUORINE FROM CHAMBER MATERIAL SURFACES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPT. |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CA 95052 |
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