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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/26/2002
Application #:
09523402
Filing Dt:
03/10/2000
Inventors:
William Bartlett, Arulkumar Shanmugasundram, Jim Tobin
Title:
Drive system for a carrier head support structure
Assignment: 1
Reel/Frame:
010884/0450Recorded: 06/05/2000Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/20/2000
Exec Dt:
03/20/2000
Exec Dt:
03/31/2000
Assignee:
LEGAL AFFAIRS DEPARTMENT
P.O. BOX 450A M/S #2061
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
PATENT COUNSEL
P.O. BOX 450A
M/S 2061
SANTA CLARA, CA 95052

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