Patent Assignment Abstract of Title
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Total Assignments:
5
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09747822
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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01/31/2002
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Inventors:
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Mohammad Kamarehi, Gerald M. Cox
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Title:
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Remote plasma mixer
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 108 CHERRY HILL DRIVE |
| ATTN: PATENT LAW DEPARTMENT |
| BEVERLY, MASSACHUSETTS 01915 |
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| AXCELIS TECHNOLOGIES, INC. |
| DENIS A. ROBITAILLE |
| ATTN: PATENT LAW DEPT. |
| 108 CHERRY HILL DRIVE |
| BEVERLY, MA 01915 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 014885 FRAME 0260. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNEE NAME IS AXCELIS TECHNOLOGIES, INC.
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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Assignment:
3
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 2001 JEFFERSON DAVIS, HWY., SUITE 1007 |
| ARLINGTON, VA 22202 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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Assignment:
5
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TERMINATION OF SECURITY AGREEMENT
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01905 |
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| THOMAS FAHEY |
| NATIONAL CORPORATE RESEARCH, LTD. |
| 1100 G STREET NW, SUITE 420 |
| WASHINGTON, DC 20005 |
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