Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09350802
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Filing Dt:
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07/09/1999
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Inventors:
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DANNY CHIEN LU, ALLEN ZHAO, PETER HSIEH, HONG SHIH, LI XU, YAN YE
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Title:
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METHOD OF CLEANING A SEMICONDUCTOR DEVICE PROCESSING CHAMBER AFTER A COPPER ETCH PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PO BOX 450-A |
| SANTA CLARA, CA 95052 |
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