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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/12/2002
Application #:
09522705
Filing Dt:
03/10/2000
Inventors:
Ichiju Satoh, Norio Kimura, Katsuya Okumura
Title:
Polishing apparatus including attitude controller for turntable and/or wafer carrier
Assignment: 1
Reel/Frame:
010619/0321Recorded: 03/10/2000Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/06/2000
Exec Dt:
03/06/2000
Exec Dt:
03/06/2000
Assignees:
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
72, HORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI
KANAGAWA-KEN, JAPAN
Correspondent:
WENDEROTH, LIND & PONACK, L.L.P.
ATTN: NILS E. PEDERSEN, ESQ.
2033 K STREET, N.W., SUITE 800
WASHINGTON, D.C. 20006

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