Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09511276
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Filing Dt:
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02/23/2000
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Inventors:
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Vladislav Vassiliev, John Leonard Sudijono, Yelehanka Ramachandramurthy Pradeep et al
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Title:
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Gas-phase additives for an enhancement of lateral etch component during high density plasma film deposition to improve film gap-fill capability
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 60 WOODLANDS INDUSTRIAL PARK D STREET 2 |
| SINGAPORE, SINGAPORE 73840 |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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