Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09039482
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Filing Dt:
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03/16/1998
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Inventors:
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MASAHIKO KOBAYASHI, HAJIME SAHASE, NOBUYUKI TAKAHASHI
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Title:
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IONIZATION SPUTTERING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-8-1 YOTSUYA FUCHU-SHI |
| TOKYO, JAPAN |
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| ARMSTRONG WESTERMAN HATTORI MCLELAND & |
| NAUGHTON - WILLIAM F. WESTERMAN |
| 1725 K ST., NW |
| SUITE 1000 |
| WASHINGTON, DC 20006 |
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