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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/26/2002
Application #:
09374469
Filing Dt:
08/13/1999
Inventor:
CALVIN TODD GABRIEL
Title:
METHOD FOR REDUCING THE AMOUNT OF PERFLUOROCOMPOUND GAS CONTAINED IN EXHAUST EMISSIONS FROM PLASMA PROCESSING
Assignment: 1
Reel/Frame:
010177/0711Recorded: 08/13/1999Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
08/13/1999
Assignee:
1109 MCKAY DRIVE
SAN JOSE, CALIFORNIA 95131
Correspondent:
MARTINE PENILLA & KIM, LLP
PETER B. MARTINE
830 WEST EVELYN AVENUE
SUNNYVALE, CA 94086

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