Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09485935
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Filing Dt:
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02/18/2000
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Inventors:
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KAZUYA NAGASEKI, HIROKI YAMAZAKI
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Title:
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METHOD FOR CONTROLLING PLASMA PROCESSOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME |
| TOKYO 107-8481, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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