Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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09495281
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Filing Dt:
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01/31/2000
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Inventors:
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Bryan K. Choo, Bhanwar Singh, Sanjay K. Yedur, Khoi A. Phan
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Title:
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Analysis of CD-SEM signal to detect scummed/closed contact holes and lines
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE AMD PLACE, P.O. BOX 3453 |
| SUNNYVALE, CALIFORNIA 94088 |
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| AMIN, ESCHWEILER, TUROCY, LLP |
| THOMAS G. ESCHWEILER |
| 24TH FLOOR, NATIONAL CITY CENTER |
| 1900 EAST NINTH STREET |
| CLEVELAND, OHIO 44114 |
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