Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09484252
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Filing Dt:
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01/18/2000
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Inventors:
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Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Nobuo Hayasaka, Katsuya Okumura et al
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Title:
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A CHEMICAL MECHANICAL METHOD OF POLISHING WAFER SURFACES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72, HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, KANAGAWA, JAPAN |
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| 2-11-24, TSUKIJI, CHUO-KU |
| TOKYO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL |
| NORMAN F. OBLON |
| 1755 JEFFESON DAVIS HIGHWAY |
| FOURTH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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