Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09270449
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Filing Dt:
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03/16/1999
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Inventor:
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ATSUSHI YAMADA
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Title:
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OPTICAL SYSTEM FOR CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS EXHIBITING REDUCED THIRD-AND FIFTH-ORDER ABERRATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN ET AL |
| DONALD L. STEPHENS JR. |
| 121 S.W. SALMON STREET |
| 1 WORLD TRADE CENTER SUITE 1600 |
| PORTLAND, OR 97204-2988 |
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