Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09560504
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Filing Dt:
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04/27/2000
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Inventors:
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Guoguang Li, Dale A. Harrison, Abdul Rahim Forouhi
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Title:
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GRADED ANTI-REFLECTIVE COATINGS FOR PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3150 DE LA CRUZ BLVD., SUITE 105 |
| SANTA CLARA, CALIFORNIA 95054 |
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| LUMEN |
| MAREK ALBOSZTA |
| 426 LOWELL AVENUE |
| PALO ALTO, CALIFORNIA 94301 |
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