Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09929586
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Filing Dt:
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08/14/2001
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Publication #:
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Pub Dt:
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02/28/2002
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Inventor:
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Yasushi Sasaki
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Title:
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METHOD FOR DRYING A SEMICONDUCTOR WAFER, A MIXTURE FOR DRYING, AND A DRYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 7-1 SHIBA 5-CHOME |
| TOKYO, JAPAN |
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| HUTCHINS, WHEELER & DITTMAR |
| DONALD W. MUIRHEAD |
| PATENT GROUP |
| 101 FEDERAL STREET |
| BOSTON, MA 02110 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1753 SHIMONUMABE, NAKAHARA-KU |
| KAWASAKI, KANAGAWA 211-8668, JAPAN |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20037 |
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