Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09297070
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Filing Dt:
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04/30/1999
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Inventors:
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AKIRA SEKIYA, TOSHIRO YAMADA, KUNIAKI GOTO, TETSUYA TAKAGAKI
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Title:
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DRY ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU |
| TOKYO, 100, JAPAN |
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| 4-28, MITA 1-CHOME, MINATO-KU |
| TOKYO, 108, JAPAN |
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| 2-2, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, 100, JAPAN |
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| 6-1, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, 100, JAPAN |
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| ARMSTRONG, WESTERMAN, HATTORI ETAL. |
| LE-NHUNG MCLELAND |
| SUITE 1000 |
| 1725 K STREET, N.W. |
| WASHINGTON, D.C. 20006 |
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