Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09740408
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Filing Dt:
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12/18/2000
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Inventors:
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Tzung-Hua Ying, Tang Yu, Tse-Wei Liu, Cheng-Chieh Huang
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Title:
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METHOD OF INCREASING SELECTIVITY IN SILICON NITRIDE DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 3, LI-HSIN RD. II. |
| HSINCHU, TAIWAN R.O.C |
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| THOMAS, KAYDEN, HORSTEMEYER & RISLEY LLP |
| DANIEL R. MCCLURE |
| 100 GALLERIA PARKWAY |
| SUITE 1750 |
| ATLANTA, GA 30339 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 7-1, SHIBA 5-CHOME |
| TOKYO, JAPAN |
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| MINATO-KU |
| 5-1, TAITO 1-CHOME, TAITO-KU |
| TOKYO, JAPAN |
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| SCULLY, SCOTT, MURPHY & PRESSER |
| PUAL J. ESATTO, JR. |
| 400 GARDEN CITY PLAZA |
| GARDEN CITY, NY 11530 |
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