Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09561325
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Filing Dt:
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04/28/2000
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Inventors:
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Karthik Janakiraman, Kelly Fong, Chen-An Chen, Paul Le, Rong Pan, Shankar Venkataraman
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Title:
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INTEGRATION OF REMOTE PLASMA GENERATOR WITH SEMICONDUCTOR PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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