Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09520831
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Filing Dt:
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03/08/2000
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Inventors:
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Akira Doi, Ken Yoshioka, Tsunehiko Tsubone, Manabu Edamura, Hideyuki Kazumi et al
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Title:
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Plasma processing apparatus and method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6 KANDA SURUGADAI 4-CHOME |
CHIYODA-KU, TOKYO 101-8010, JAPAN |
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ATSK, LLP |
MELVIN KRAUS |
1300 NORTH 17TH STREET |
SUITE 1800 |
ARLINGTON, VA 22209 |
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