Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09157421
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Filing Dt:
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09/21/1998
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Inventor:
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ISAO NAKATANI
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Title:
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METHOD FOR REACTIVE ION ETCHING AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-2-1, SENGEN, TSUKUBA-SHI |
| IBARAKI, JAPAN |
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| 4-1-8 HON-CHO, KAWAGUCHI-SHI |
| SAITAMA, JAPAN |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| WARREN M. CHEEK, JR. |
| 2033 K STREET, N.W., SUITE 800 |
| WASHINGTON, DC 20006 |
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