Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09336404
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Filing Dt:
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06/18/1999
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Inventors:
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GUOGUANG LI, HONGWEI ZHU, DALE A. HARRISON, ABDUL RAHIM FOROUHI, WEILU XU
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Title:
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METHOD AND APPARATUS FOR OPTICALLY DETERMINING PHYSICAL PARAMETERS OF THIN FILMS DEPOSITED ON A COMPLEX SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SUITE 105 |
3150 DE LA CRUZ BLVD |
SANTA CLARA, CALIFORNIA 95054 |
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LUMEN |
MAREK ALBOSZTA |
426 LOWELL AVENUE |
PALO ALTO, CA 94301 |
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