Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09487325
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Filing Dt:
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01/19/2000
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Inventors:
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Thomas E. Wicker, Robert A. Maraschin, William S. Kennedy
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Title:
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LOW CONTAMINATION HIGH DENSITY PLASMA ETCH CHAMBERS AND METHODS FOR MAKING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS, DOANE, SWECKER & MATHIS, L.L.P. |
| JAMES W. PETERSON |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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