Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09349846
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Filing Dt:
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07/08/1999
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Inventor:
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CHUNG-ZEN CHEN
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Title:
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CMP METHOD AND SUBSTRATE CARRIER HEAD FOR POLISHING WITH IMPROVED UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
123, PARK AVE. - 3RD |
HSIN-CHU, TAIWAN R.O.C |
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GEORGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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