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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6398373
Issue Dt:
06/04/2002
Application #:
09635984
Filing Dt:
08/09/2000
Inventors:
Andrew J. Guzman, Carlo La Fiandra, Ronald P. Sidor, Jorge S. Ivaldi, Michael L. Nelson
Title:
PNEUMATIC CONTROL SYSTEM AND METHOD FOR SHAPING DEFORMABLE MIRRORS IN LITHOGRAPHIC PROJECTION SYSTEMS
Assignment: 1
Reel/Frame:
011327/0918Recorded: 11/28/2000Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
GUZMAN, ANDREW J.
Exec Dt:
11/01/2000
LA FIANDRA, CARLO
Exec Dt:
11/01/2000
SIDOR, RONALD P.
Exec Dt:
11/01/2000
IVALDI, JORGE S.
Exec Dt:
11/02/2000
NELSON, MICHAEL L.
Exec Dt:
11/17/2000
Assignee:
SILICON VALLEY GROUP, INC.
SUITE 400
101 METRO DRIVE
SAN JOSE, CALIFORNIA 95110
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX, PLLC
DONALD J. FEATHERSTONE
1100 NEW YORK AVE., N.W.
SUITE 600
WASHINGTON, D.C. 20005-3934
Assignment: 2
Reel/Frame:
012880/0822Recorded: 05/10/2002Pages: 4
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
SILICON VALLEY GROUP, INC.
Exec Dt:
11/01/2001
Assignee:
ASML US, INC.
77 DANBURY ROAD
WILTON, CONNECTICUT 06897
Correspondent:
STERNE, KESSLER, GOLDSTEIN, ET AL.
DONALD J. FEATHERSTONE
1100 NEW YORK AVENUE, N.W.
SUITE 600
WASHINGTON, D.C. 20005-3934

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