Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09521601
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Filing Dt:
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03/09/2000
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Inventors:
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Satoru Kawakami, Shigemi Murakawa, Mitsuhiro Yuasa, Toshiaki Hongoh
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Title:
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SEMICONDUCTOR MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME |
| TOKYO, JAPAN 107-0 |
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| PILLSBURY MADISON & SUTRO LLP |
| DALE S. LAZAR |
| 1100 NEW YORK AVE, NW |
| 9TH FLOOR |
| WASHINGTON, DC 20005-3918 |
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