Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
06/04/2002
|
Application #:
|
09241576
|
Filing Dt:
|
02/02/1999
|
|
Inventors:
|
ISAMU SETO, ATSUSHI SAITO, HIDEFUMI YABARA
|
|
Title:
|
CHARGED-PARTICLE BEAM LITHOGRAPHY APPARATUS AND SYSTEM CAPABLE OF READILY DETECTING ABNORMALITY IN CONTROLLING ON-OFF OPERATION
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
|
|
|
|
| CHRISTIE, PARKER & HALE, LLP |
| D. BRUCE PROUT |
| P.O. BOX 7068 |
| PASADENA CA 91109-7068 |
|
|
Search Results as of:
04/26/2024 08:20 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
