Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09409840
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Filing Dt:
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09/30/1999
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Inventor:
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ARTHUR M. HOWALD
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Title:
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SCATTERING METHOD FOR ENDPOINTING PLASMA ETCH PROCESS AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY, BUILDING CA-1 |
| FREMONT, CALIFORNIA 94538 |
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| HICKMAN STEPHENS COLEMAN & HUGHES, LLP |
| DOUGLAS F. MACKENZIE |
| P.O. BOX 52037 |
| PALO ALTO, CA 94303-0746 |
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