Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09285696
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Filing Dt:
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04/05/1999
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Inventors:
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WILLIAM J. BAGGENSTOSS, WILLIAM A. STANTON
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Title:
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METHOD TO ELIMINATE SIDE LOBE PRINTING OF ATTENUATED PHASE SHIFT MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8000 S. FEDERAL WAY |
| BOISE, IDAHO 83706 |
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| DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP |
| THOMAS J. D'AMICO |
| 2101 L STREET NW |
| WASHINGTON, DC 20037-1526 |
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