Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
06/18/2002
|
Application #:
|
09344671
|
Filing Dt:
|
06/25/1999
|
|
Inventors:
|
JEFFREY J. FARBER, JULIA S. SVIRCHEVSKI
|
|
Title:
|
METHOD AND SYSTEM OF CLEANING A WAFER AFTER CHEMICAL MECHANICAL POLISHING OR PLASMA PROCESSING
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
|
|
| MARTINE PENILLA & KIM, LLP |
| TOBI C. CLINTON |
| 830 WEST EVELYN AVENUE |
| SUNNYVALE, CA 94086 |
|
|
Search Results as of:
05/21/2024 12:47 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
