Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09193669
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Filing Dt:
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11/17/1998
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Inventors:
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CHUN-CHING TSAN, YING-LANG WANG, HUI-LING WANG, CHIN KUN LAN
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Title:
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METHOD TO SOLVE THE DELAMINATION OF A SILICON NITRIDE LAYER FROM AN UNDERLYING SPIN ON GLASS LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121 PARK AVE. 3 |
| HSIN-CHU, R.O.C., TAIWAN |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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