Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09405949
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Filing Dt:
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09/27/1999
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Publication #:
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Pub Dt:
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11/22/2001
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Inventors:
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THOMAS D. NGUYEN, GEORGE MUELLER, PETER MCGRATH
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Title:
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TECHNIQUES FOR IMPROVING ETCHING IN A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER & WEAVER, LLP |
| RAMIN MAHBOUBIAN |
| P.O. BOX 61059 |
| PALO ALTO, CA 94306 |
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