Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09584167
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Filing Dt:
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05/25/2000
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Inventors:
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Michael S. Cox, Canfeng Lai, Robert B. Majewski, David P. Wanamaker et al
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Title:
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TOROIDAL PLASMA SOURCE FOR PLASMA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| P.O BOX 450A |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
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