Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09437447
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Filing Dt:
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11/10/1999
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Inventors:
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MASAYUKI KOJIMA, YOSHIFUMI TAHARA, MASAYUKI TOMOYASU, AKIRA KOSHIISHI
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Title:
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PLASMA TREATMENT APPARATUS AND ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL |
| MARVIN J. SPIVAK |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HWY. |
| ARLINGTON, VIRGINIA 22202 |
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