Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09663646
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Filing Dt:
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09/18/2000
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Inventor:
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Ronald Kevin Sampson
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Title:
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USE OF ACOUSTIC SPECTRAL ANALYSIS FOR MONITORING/CONTROL OF CMP PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1310 ELECTRONICS DRIVE |
| CARROLLTON, TEXAS 75006 |
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| FELSMAN, BRADLEY, VADEN, GUNTER ET AL |
| DAN VENGLARIK |
| 201 MAIN STREET, SUITE 1600 |
| FORT WORTH, TX 76102 |
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