Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
07/30/2002
|
Application #:
|
09660194
|
Filing Dt:
|
09/12/2000
|
|
Inventors:
|
Chishio Koshimizu, Jun Ooyabu, Hideki Takeuchi, Akira Koshiishi
|
|
Title:
|
PLASMA PROCESSING METHOD AND APPARATUS FOR ELIMINATING DAMAGES IN A PLASMA PROCESS OF A SUBSTRATE
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
|
|
|
|
| PILLSBURY MADISON & SUTRO LLP |
| DALE S. LAZAR |
| INTELLECTUAL PROPERTY GROUP |
| 1100 NEW YORK AVENUE, NW, NINTH FLOOR |
| WASHINGTON, DC 20005-3918 |
|
|
Search Results as of:
05/02/2024 04:08 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
