Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09346258
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Filing Dt:
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06/30/1999
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Inventors:
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CRAIG STEVENS, TONY JAKUBIEC
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Title:
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WAFER PROCESSING ARCHITECTURE INCLUDING SINGLE-WAFER LOAD LOCK WITH COOLING UNIT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN, MORRILL, MACPHERSON, FRANKLIN |
| & FRIEL LLP, DAVID E. STEUBER |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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