Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09506112
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Filing Dt:
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02/17/2000
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Inventors:
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Ji Ding, Kidehiro Kojiri, Yoshio Ishikawa, Keiji Horioka, Ruiping Wang, Robert W. Wu et al
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Title:
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DIELECTRIC ETCH PROCESS REDUCING STRIATIONS AND MAINTAINING CRITICAL DIMENSIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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