Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
Total Assignments:
1
|
Patent #:
|
|
Issue Dt:
|
08/20/2002
|
Application #:
|
09949506
|
Filing Dt:
|
09/10/2001
|
Inventors:
|
Ming Huan Tsai, Bao-Ching Pen, Mei-Ru Kuo, Hun-Jan Tao
|
Title:
|
SELECTIVITY OXIDE-TO-OXYNITRIDE ETCH PROCESS USING A FLUORINE CONTAINING GAS, AN INERT GAS AND A WEAK OXIDANT
|
|
Assignment:
1
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
SCIENCE-BASED INDUSTRIAL PARK |
121 PARK AVE. 3 |
HSIN-CHU, TAIWAN R.O.C |
|
|
|
GEORGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
|
|
Search Results as of:
05/27/2024 11:34 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|