Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09679718
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Filing Dt:
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09/29/2000
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Inventors:
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Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Martin Antoni, Udo Dinger et al
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 89518 HEIDENHEIM, GERMANY |
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| OHLANDT, GREELEY, RUGGIERO & PERLE, LLP |
| CHARLES N.J. RUGGIERO |
| ONE LANDMARK SQUARE, 9TH FLOOR |
| STAMFORD, CONNECTICUT 06901-2682 |
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