Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09605644
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Filing Dt:
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06/28/2000
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Inventors:
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Bo-Soon Jang, Kil-Yong Noh, Hae-Sung Kim, Jong-Mo Ahn, Woo-Kyu Lee
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Title:
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SEMICONDUCTOR FACTORY AUTOMATION SYSTEM AND METHOD FOR RESETTING PROCESS RECIPE BY EMPLOYING TRACE FILE
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SAN 136-1, AMI-RI, BUBAL-EUB |
ICHON, KYOUNGKI-DO, KOREA, REPUBLIC OF 467-8 |
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JACOBSON, PRICE, HOLMAN ET AL. |
YOON S. HAM |
400 7TH STREET, N.W. |
WASHINGTON, D.C. 20004 |
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