Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09578572
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Filing Dt:
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05/25/2000
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Inventor:
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Martin Feldman
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Title:
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METHOD OF DISTORTION COMPENSATION BY IRRADIATION OF ADAPTIVE LITHOGRAPHY MEMBRANE MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OFFICE OF INTELLECTUAL PROPERTY |
| 203 DAVID BOYD |
| BATON ROUGE, LOUISIANA 70803 |
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| TAYLOR, PORTER, BROOKS & PHILLPS, L.L.P. |
| JOHN H. RUNNELS |
| P.O. BOX 2471 |
| BATON ROUGE, LA 70821 |
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