Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09519134
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Filing Dt:
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03/06/2000
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Inventor:
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Chin-teh Yeh
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Title:
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METHOD AND APPARATUS TO REDUCE BIAS BETWEEN DENSE AND SPARSE PHOTORESIST PATTERNS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 19 LI HSIN ROAD, SCIENCE-BASED INDUSSTRIAL PARK |
| HSINCHU, R.O.C., TAIWAN |
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| JOHNSON & KINDNESS PLLC |
| ADAM L.K. PHILIPP, ESQ. |
| CHRISTENSEN O'CONNOR |
| 1420 FIFTH AVENUE, SUITE 2800 |
| SEATTLE, WA 98101-2347 |
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