Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09287611
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Filing Dt:
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04/07/1999
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Inventors:
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ATSUSHI DENDA, YOSHINAO ITO
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Title:
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METHOD FOR DETECTING END POINT OF PLASMA ETCHING, AND PLASMA ETCHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-1, NISHI-SHINJUKU 2-CHOME |
| SHINJUKU-KU, TOKYO, JAPAN |
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| KONRAD RAYNES & VICTOR LLP |
| ALAN RAYNES |
| 1180 SOUTH BEVERLY DRIVE, SUITE 501 |
| LOS ANGELES, CA 90035 |
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