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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6450190
Issue Dt:
09/17/2002
Application #:
09826834
Filing Dt:
04/06/2001
Publication #:
20020005785
Pub Dt:
01/17/2002
Inventors:
Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kazuo Fukasawa et al
Title:
METHOD OF DETECTING ABNORMALITIES IN FLOW RATE IN PRESSURE-TYPE FLOW CONTROLLER
Assignment: 1
Reel/Frame:
012057/0074Recorded: 08/07/2001Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
OHMI, TADAHIRO
Exec Dt:
07/17/2001
IIDA, SEIICHI
Exec Dt:
07/17/2001
KAGATSUME, SATOSHI
Exec Dt:
07/17/2001
HIROSE, JUN
Exec Dt:
07/17/2001
FUKASAWA, KAZUO
Exec Dt:
07/17/2001
KOIZUMI, HIROSHI
Exec Dt:
07/17/2001
NAGAOKA, HIDEKI
Exec Dt:
07/17/2001
UNO, TOMIO
Exec Dt:
07/17/2001
NISHINO, KOUJI
Exec Dt:
07/17/2001
IKEDA, NOBUKAZU
Exec Dt:
07/17/2001
DOHI, RYOUSUKE
Exec Dt:
07/17/2001
IDETA, EIJI
Exec Dt:
07/17/2001
Assignees:
OHMI, TADAHIRO
AOBA-KU, SENDAI-SHI
1-17-301, KOMEGAHUKURO 2-CHOME
MIYAGI 980-0813, JAPAN
IIDA, SEIICHI
HIGASHINADA-KU
5-3, SUMIYOSHIYAMATE 1-CHOME,
KOBE-SHI, HYOGO 658-0063, JAPAN
TOKYO ELECTRON LTD.
HIGASHINADA-KU
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO 107-0052, JAPAN
FUJIKIN INCORPORATED
HIGASHINADA-KU
3-2, ITACHIBORI 2-CHOME, NISHI-KU
OSAKA-SHI, OSAKA 550-0012, JAPAN
Correspondent:
GRIFFIN & SZIPL, P.C.
JOERG-UWE SZIPL
SUITE PH-1, 2300 NINTH STREET, SOUTH
ARLINGTON, VA 22204-2320

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